Alicat Mass Flow Controller – Standard Configuration

Description

Default configuration:

Specification

  • 0.025 SCCM to 5000 SLPM available flow measurement range
  • 0.01% to 100% of full scale measurement range
  • ±0.6% of reading accuracy on most flow ranges
  • ± 0.1% of reading + 0.02% of full scale repeatability
  • −10°C to +60°C Operating Temperature
  • 145 psig max operating procedure
  • 25°C & 1 atm STP default (user selectable)
  • 10 ms measurement response time

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